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Thermo Scientific™ SURF-CAL™ Particle Size Standards
Simplify the preparation of calibration wafers with these particle size standards.
Specifications
| Additive | None |
|---|---|
| Content And Storage | Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. |
| Contents | Polystyrene microspheres in deionized, filtered water |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Code | Brand | Concentration | Diameter (Metric) | Price | Quantity & Availability | ||||
|---|---|---|---|---|---|---|---|---|---|
| Product Code | Brand | Concentration | Diameter (Metric) | Price | Quantity & Availability | ||||
|
11884862
|
Thermo Scientific™
PD-047 |
3 x 108 particles/mL | 0.047 μm |
N/A
|
N/A | ||||
|
11894862
|
Thermo Scientific™
PD-047B |
1 x 10¹° particles/mL | 0.047 μm |
N/A
|
N/A | ||||
|
11804872
|
Thermo Scientific™
PD-064 |
3 x 108 particles/mL | 0.064 μm |
N/A
|
N/A | ||||
|
11814872
|
Thermo Scientific™
PD-064B |
1 x 10¹° particles/mL | 0.064 μm |
N/A
|
N/A | ||||
|
11824872
|
Thermo Scientific™
PD-083 |
3 x 108 particles/mL | 0.083 μm |
N/A
|
N/A | ||||
|
11834872
|
Thermo Scientific™
PD-083B |
1 x 10¹° particles/mL | 0.083 μm |
N/A
|
N/A | ||||
|
11844872
|
Thermo Scientific™
PD-092 |
3 x 108 particles/mL | 0.092 μm |
N/A
|
N/A | ||||
|
11854872
|
Thermo Scientific™
PD-092B |
1 x 10¹° particles/mL | 0.092 μm |
N/A
|
N/A | ||||
|
11864872
|
Thermo Scientific™
PD-100 |
3 x 108 particles/mL | 0.100 μm |
N/A
|
N/A | ||||
|
11874872
|
Thermo Scientific™
PD-100B |
1 x 10¹° particles/mL | 0.100 μm |
N/A
|
N/A | ||||
|
11884892
|
Thermo Scientific™
PD1100 |
3 x 108 particles/mL | 1.112 μm |
N/A
|
N/A | ||||
|
11894892
|
Thermo Scientific™
PD1100B |
1 x 10¹° particles/mL | 1.112 μm |
N/A
|
N/A | ||||
|
11804882
|
Thermo Scientific™
PD-155 |
3 x 108 particles/mL | 0.155 μm |
N/A
|
N/A | ||||
|
11814882
|
Thermo Scientific™
PD-155B |
1 x 10¹° particles/mL | 0.155 μm |
N/A
|
N/A | ||||
|
11804902
|
Thermo Scientific™
PD1600 |
3 x 108 particles/mL | 1.59 μm |
N/A
|
N/A | ||||
|
11824882
|
Thermo Scientific™
PD-200 |
3 x 108 particles/mL | 0.202 μm |
N/A
|
N/A | ||||
|
11814902
|
Thermo Scientific™
PD2000 |
3 x 108 particles/mL | 2.01 μm |
N/A
|
N/A | ||||
|
11834882
|
Thermo Scientific™
PD-200B |
1 x 10¹° particles/mL | 0.202 μm |
N/A
|
N/A | ||||
|
11844882
|
Thermo Scientific™
PD-204 |
3 x 108 particles/mL | 0.204 μm |
N/A
|
N/A | ||||
|
11854882
|
Thermo Scientific™
PD-204B |
1 x 10¹° particles/mL | 0.204 μm |
N/A
|
N/A | ||||
|
11864882
|
Thermo Scientific™
PD-215 |
3 x 108 particles/mL | 0.220 μm |
N/A
|
N/A | ||||
|
11874882
|
Thermo Scientific™
PD-215B |
1 x 10¹° particles/mL | 0.220 μm |
N/A
|
N/A | ||||
|
11824902
|
Thermo Scientific™
PD3000 |
3 x 108 particles/mL | 3.04 μm |
N/A
|
N/A | ||||
|
11884882
|
Thermo Scientific™
PD-305 |
3 x 108 particles/mL | 0.304 μm |
N/A
|
N/A | ||||
|
11894882
|
Thermo Scientific™
PD-305B |
1 x 10¹° particles/mL | 0.304 μm |
N/A
|
N/A | ||||
|
11804892
|
Thermo Scientific™
PD-365 |
3 x 108 particles/mL | 0.360 μm |
N/A
|
N/A | ||||
|
11814892
|
Thermo Scientific™
PD-365B |
1 x 10¹° particles/mL | 0.360 μm |
N/A
|
N/A | ||||
|
11824892
|
Thermo Scientific™
PD-500 |
3 x 108 particles/mL | 0.498 μm |
N/A
|
N/A | ||||
|
11834892
|
Thermo Scientific™
PD-500B |
1 x 10¹° particles/mL | 0.498 μm |
N/A
|
N/A | ||||
|
11844892
|
Thermo Scientific™
PD-800 |
3 x 108 particles/mL | 0.809 μm |
N/A
|
N/A | ||||
|
11854892
|
Thermo Scientific™
PD-800B |
1 x 10¹° particles/mL | 0.809 μm |
N/A
|
N/A | ||||
|
11864892
|
Thermo Scientific™
PD-802 |
3 x 108 particles/mL | 0.802 μm |
N/A
|
N/A | ||||
|
11874892
|
Thermo Scientific™
PD-802B |
1 x 10¹° particles/mL | 0.802 μm |
N/A
|
N/A | ||||
Description
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Specifications
| None | |
| Polystyrene microspheres in deionized, filtered water | |
| Polystyrene | |
| Certificate of Calibration and Traceability to NIST | |
| 50 mL | |
| Product stable for a minimum of 12 months |
| Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer. | |
| SSIS Calibration and Maintenance | |
| Size Standard Particles | |
| 1.05g/cm³ | |
| 1.59 at 589nm (25°C) |